Authors

Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger

Conference

High-Mobility Group-IV Materials and Devices

Title

(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers

Publication type

Proceedings paper

Embargo date

9999-12-31