Authors

Vitchev, R.G.; Pireaux, J.J.; Conard, Thierry; Bender, Hugo; Wolstenholme, J.; Defranoux, C.

Issue

1_2

Journal

Applied Surface Science

Volume

235

Title

X-ray photoelectron spectroscopy characterisation of high-k dielectric Al2O3 and HfO2 layers deposited on SiO2/Si surface

Publication type

Journal article