Formation of ternary Ni-silicide on relaxed and strained SiGe layers

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Authors

Zhao, Q.T.; Buca, D.; Lenk, S.; Loo, Roger; Caymax, Matty; Mantl, S.

Issue

1_4

Journal

Microelectronic Engineering

Volume

76

Title

Formation of ternary Ni-silicide on relaxed and strained SiGe layers

Publication type

Journal article

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