Request a copy of the file

Enter the following information to request a copy for the following item: Crystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications

Requesting the following file: Pollefliet_2024_Jpn._J._Appl._Phys._63_02SP97.pdf

This email address is used for sending the file.
Files

Back