Publication:
Crystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
Loading...
Journal
Abstract
Description
Metrics
Downloads
2 since deposited on 2024-02-16
Acq. date: 2025-12-09
Views
609 since deposited on 2024-02-16
1last month
Acq. date: 2025-12-09
Citations
Metrics
Downloads
2 since deposited on 2024-02-16
Acq. date: 2025-12-09
Views
609 since deposited on 2024-02-16
1last month
Acq. date: 2025-12-09
Citations