Publication:
Crystallinity and composition of Sc1-x(-y)SixP(y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
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Acq. date: 2026-01-26
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Acq. date: 2026-01-26
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2 since deposited on 2024-02-16
Acq. date: 2026-01-26
Views
609 since deposited on 2024-02-16
Acq. date: 2026-01-26
Citations