Request a copy of the file
Enter the following information to request a copy for the following item: Role of defects in the reliability of HfO2/Si-based spacer dielectric stacks for local interconnects
Requesting the following file: 40285.pdf
Enter the following information to request a copy for the following item: Role of defects in the reliability of HfO2/Si-based spacer dielectric stacks for local interconnects
Requesting the following file: 40285.pdf