Publication:
Role of defects in the reliability of HfO2/Si-based spacer dielectric stacks for local interconnects
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1996 since deposited on 2021-10-27
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Acq. date: 2026-08-05
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1996 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-08-05
Citations