Publication:
Role of defects in the reliability of HfO2/Si-based spacer dielectric stacks for local interconnects
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1995 since deposited on 2021-10-27
1last month
Acq. date: 2026-01-27
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Statistics
Views
1995 since deposited on 2021-10-27
1last month
Acq. date: 2026-01-27
Citations