Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors
Statistics
Statistics by Category
Download view's map
PNG
JPEG/JPG
Reports
Most viewed
Most viewed per month
Top city views
File Visits
Export Excel
Export CSV
Item
Views
Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors
1342