Publication:
Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors
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2004 since deposited on 2021-10-20
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Acq. date: 2026-08-07
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2004 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-08-07
Citations