Publication:
Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.thesisadvisor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-20T11:15:41Z | |
| dc.date.available | 2021-10-20T11:15:41Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2012-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20736 | |
| dc.title | Poly-SiGe for MEMS-above-CMOS integration: study of piezoresistivity with application to pressure sensors | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |