Browsing by Author "Ablett, James"
- Results Per Page
- Sort Options
Publication Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Journal article2012, Japanese Journal of Applied Physics, (51) 5, p.05EB01Publication Characterization of CVD-Mn barrier layers using X-ray absorption fine structure
Oral presentation2011, Advanced Metallization Conference - ADMETAPublication Interface passivation of III-V/high-k materials by High Energy X-ray Photoelectron Spectroscopy: A quantitative evaluation
Meeting abstract2016, Hi-SPEAR Satellite Workshop: Synchrotron SOLEIL, 19/01/2016Publication Interpretation of Cu/SOG stress induced voiding using stress measurements performed with synchrotron radiation
Oral presentation2011, Advanced Metallization Conference - AMCPublication Metal-insulator transition in ALD VO2 ultrathin films and nanoparticles: morphological control
Journal article2015, Advanced Functional Materials, (25) 5, p.679-686Publication Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures
Journal article2009, Applied Physics Letters, (94) 4, p.42112Publication Study of deposition behavior of thermal/plasma-enhanced chemical vapor deposition (CVD/PECVD) of manganese on porous SiCOH low-k dielectric materials for copper diffusion barrier application in advanced interconnect technology
Meeting abstract2012, MRS Spring Symposium C: Interconnect Challenges for CMOS Technology, 9/04/2012, p.C4.2