Browsing by Author "Andreas, Michael"
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Publication Acoustic cleaning in nano-electronics
Proceedings paper2008, Acoustics, 29/06/2008, p.556-560Publication Damage cluster analysis of patterned wafers during solvent spray cleaning
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2081Publication Damage cluster analysis of patterned wafers during solvent spray cleaning
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.219-225Publication High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Journal article2009, Solid State Phenomena, 145-146, p.39-42Publication High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents
Journal article2009, Journal of Adhesion Science and Technology, (23) 12, p.1709-1721Publication Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
; ; ; ; ; Proceedings paper2008, 7th International Semiconductor Technology Conference - ISTC, 15/03/2008, p.436-446Publication Spray systems for cleaning during semiconductor manufacturing
Oral presentation2008, 22nd European Conference on Liquid Atomization and Spray SystemsPublication Tackling the challenges of physical cleaning
Oral presentation2008, 8th International Surface Cleaning Users Group Meeting Cleaning Technology Symposium