Browsing by Author "Aubuchon, Joseph"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Metallization of sub- 30 nm Interconnects: Comparison of different liner/seed combinations
Proceedings paper2009, Proceedings of the IEEE International Interconnect Technology Conference, 1/06/2009, p.200-202Publication Plasma enhanced atomic layer deposition of ruthenium ultra-thin films for advanced metallization
Meeting abstract2010, AVS 57th International Symposium & Exhibition, 17/10/2010Publication Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
Journal article2012, Journal of Vacuum Science and Technology A, (30) 1, p.01A103