Browsing by Author "Bertrand, P."
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Publication Advanced characterisation : an indispensable tool for ultra clean processing
Journal article1995, Microelectronic Engineering, (28) 1_4, p.27-34Publication Combining TOF-SIMS with XPS to quantify organic surface coverages
Proceedings paper2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.821-824Publication Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.367-370Publication Influence of electromagnetic interferences on the mass sensitivity of surface acoustic wave sensors
Publication Just-Clean- Enough technology for the 21st century
Oral presentation1995, SEMICON EuropePublication ToF-SIMS and XPS characterization of plasma etch residues on cobalt silicide surfaces
Proceedings paper1997, Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference, 2/10/1995, p.921-924