Browsing by Author "Billen, Arne"
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Publication Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry
Journal article2015, Applied Surface Science, 324, p.251-257Publication Growth mechanisms for Si epitaxy on O atomic layers: impact of O-content and surface structure
Journal article2016, Applied Surface Science, 384, p.152-160Publication Sacrificial self-assembled monolayers for the passivation of GaAs (100) surfaces and interfaces
Journal article2016, Chemistry of Materials, (28) 16, p.5689-5701Publication Surface chemistry of deposition processes for epitaxial Si-O superlattices
Meeting abstract2014, 14th International Conference on Atomic Layer Deposition - ALD, 15/06/2014, p.122