Browsing by Author "Blauw, Michiel"
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Publication Atomic layer deposition of metal oxide thin films for sensing applications
Oral presentation2012, MicroNano ConferencePublication Gas sensing with atomic layer deposited dielectric thin film
Proceedings paper2013, International Conference on Materials and Applications for Sensors and Transducers - ICMAST, 13/09/2013Publication Oxygen sensing with ZnO thin films
Proceedings paper2011, IEEE Sensors Conference, 28/10/2011, p.1416-1419Publication Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase
Journal article2014, Microelectronic Engineering, 120, p.240-245Publication Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
Journal article2012, ECS Solid State Letters, (1) 2, p.P42-P44Publication Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Proceedings paper2013, Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA05.22Publication Sensitivity enhancement of metal oxide thin film transistor with back gate biasing
Proceedings paper2011, Eurosensors XXV, 4/09/2011, p.112-115