Browsing by Author "Bolt, M."
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Publication Evaluation of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, Raman spectroscopy and electrical data
Oral presentation1998, 2nd International Conference on Materials for Microelectronics; 14-15 Sept. 1998; Bordeaux, France.Publication Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
; ; Publication Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron x-ray topography, electrical data and Raman spectroscopy
Publication Simulation of mechanical stresses during shallow trench isolation process
Proceedings paper1998, Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France., p.120-123