Browsing by Author "Boufnichel, M."
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Publication Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing
Meeting abstract2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013Publication Cryoetching of silicon and advanced materials for 3D interconnects
Meeting abstract2014, ECS Fall Meeting Symposium P5: Processing Materials of 3D Interconnects, Damascene, and Electronics Packaging 6, 5/10/2014, p.1689Publication Plasma cryoetching processes for silicon and advanced materials