Browsing by Author "Brongersma, H.H."
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Meeting abstract2002, B-ALD-5: The 5th Baltic Symposium on Atomic Layer Deposition, 24/10/2002, p.21Publication Growth mechanism and continuity of atomic layer deposited TiN films on thermal SiO2
Journal article2002, Journal of Applied Physics, (92) 12, p.7641-7646Publication Nucleation and growth of TiN films deposited by atomic layer deposition
Proceedings paper2002, Proceedings of the 3rd AVS International Conference on Microelectronics and Interfaces, 11/02/2002, p.52-54