Browsing by Author "Buch, Xavier"
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Publication LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development
Publication LENS - Lithography enhancement towards nano scale
Oral presentation2010, European Nanoelectronics ForumPublication Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
Proceedings paper2012, Advances in Resist Materials and Processing Technology XXIX, 12/02/2012, p.832511Publication Ru CMP for advanced metallization
Proceedings paper2019-09, International Conference on Planarization/CMP Technology 2019, 15/09/2019