Browsing by Author "Burbine, Andrew"

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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, Germain
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Burbine, Andrew
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Torres, J. Andres
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Ma, Yuansheng
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Granik, Yuri
Proceedings paper
2014, Photomask Technology, 16/09/2014, p.92351X
Effective use of aerial image metrology for calibration of OPC models

Chen, Ao
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Foong, Yee Mei
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Thaler, Thomas
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Buttgereit, Ute
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Chung, Angeline
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Burbine, Andrew
Proceedings paper
2017, Optical Microlithography XXX, 26/02/2017, p.101470Y