Browsing by Author "Caputa, Concetta"
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Publication Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Oral presentation2004, International Symposium on Integrated FerroelectricsPublication Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Oral presentation2003, Conference of Surface Science and their Applications - CLACSA-11Publication Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Journal article2004, Physica Status Solidi C, (1) S1, p.S78-S82Publication Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Journal article2004, Integrated Ferroelectrics, 66, p.71-83Publication Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication Spacers alternatives for integration of 3D stacked SBT FeCAPs
Journal article2003, Integrated Ferroelectrics, 53, p.257-267Publication Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Proceedings paper2004, Ferroelectric Thin Films XII, 1/12/2003, p.3-8Publication Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors
Meeting abstract2004, Abstracts 16th International Symposium on Integrated Ferroelectrics, 5/04/2004, p.1-10-P