Browsing by Author "Chen, Steven"
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Publication Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers
Journal article2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 3, p.034601Publication Scaling and readiness of underlayers for high-NA EUV lithography
Proceedings paper2022, International Conference on Extreme Ultraviolet Lithography, SEP 26-29, 2022, p.122920VPublication Scaling and readiness of underlayers for high-numerical aperture extreme ultraviolet lithography
Journal article2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 4, p.044601