Browsing by Author "Colsters, Paul"
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Publication SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 27/02/2017, p.101430HPublication Single exposure EUV block downscaling for metal pitches below 32nm
Proceedings paper2017, 15th Fraunhofer IISB Lithography Simulation Workshop, 21/09/2017Publication The imec iN7 EUV platform: M2-Block and Via patterning developments
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016