Browsing by Author "Coppens, P."
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Publication A 0.35μm SiGe BiCMOS process featuring a 80 GHz Fmax HBT and integrated high-Q RF passive components
Proceedings paper2000, Proceedings Bipolar/BiCMOS Circuits and Technology Meeting - BCTM, 24/09/2000, p.106-109Publication Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing
;Ackaert, J. ;de Backer, E. ;Coppens, P.Creusen, MartinOral presentation1999, 1st European Symposium on Plasma Process Induced Damage (ESPID'1); 25-26 November 1999; Toulouse, France.Publication Breakdown and hot carrier injection in deep trench isolation structures
Journal article2005, Solid-State Electronics, (49) 8, p.1370-1375Publication Correlation between predicted cause of SRAM failures and in-line defect data
;Coppens, P. ;Vanhorebeek, GuidoDe Backer, E.Journal article2001, Microelectronics Reliability, (41) 1, p.53-57Publication Impact of charging on breakdown in deep trench isolation structures
Proceedings paper2003, Proceedings 33rd European Solid-State Devices Research Conference - ESSDERC, 16/09/2003, p.513-516Publication Innovating SRAM design and test program for fast process related defect recognition and failure analysis
;Coppens, P. ;Vanhorebeek, Guido ;De Backer, E.Yuan, Xiao JieProceedings paper1999, In-Line Methods and Monitors for Process and Yield Improvement, 22/09/1999, p.290-297Publication Innovating SRAM design for fast process related defect recognition and failure analysis
;Coppens, P. ;Vanhorebeek, Guido ;De Backer, E.Yuan, Xiao JieProceedings paper1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference, 13/09/1999, p.220-223