Browsing by Author "Cosnier, V."
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Publication Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes
Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.293Publication Issues, achievements and challenges towards intergration of high-k dielectrics
Proceedings paper2002, 5th International Forum on Semiconductor Technology - IFST, 21/02/2002Publication Thermal stability of high k layers
Proceedings paper2003, Novel Materials and Processes for Advanced CMOS, 2/12/2002, p.9-14