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Browsing by Author "Dao, T."

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    Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth

    Pawlak, Bartek  
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    Duffy, Ray
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    Janssens, Tom
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    Vandervorst, Wilfried  
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    Maex, Karen  
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    Smith, A.J.
    Journal article
    2005, Applied Physics Letters, (87) 3, p.031915-1-031915-3
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    Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy

    Puurunen, Riikka
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    Vandervorst, Wilfried  
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    Besling, Wim F. A.
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    Richard, Olivier  
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    Bender, Hugo  
    Journal article
    2004, Journal of Applied Physics, (96) 9, p.4878-4889
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    Self-aligned PtSi fully silicided (FUSI) metal gates for 45 nm CMOS applications

    Van Dal, Mark  
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    Lauwers, Anne  
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    Cunniffe, John
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    Verbeeck, Rita  
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    Vrancken, Christa  
    Proceedings paper
    2005-05, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 16/05/2005, p.233-240
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    Tantalum-based gate electrode metals for advanced CMOS devices

    Hooker, Jacob
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    Lander, Rob
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    Cubaynes, Florence
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    Schram, Tom  
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    Roozeboom, F.
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    van Zijl, J.
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    Maas, M.
    Proceedings paper
    2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.215-224

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