Browsing by Author "De Backer, E."
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Publication Correlation between predicted cause of SRAM failures and in-line defect data
Publication Impact of dummy metal structures on post oxide CMP planarization
Proceedings paper1999, 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 11/02/1999, p.413-416Publication Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies
Proceedings paper1999, ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium., p.164-167Publication Impact of reactor- and transistor-type on electron shading
Proceedings paper1999, Proceedings 1999 International Symposium on Plasma Process-Induced Damage - P2ID, 09/05/1999, p.8-11Publication Innovating SRAM design and test program for fast process related defect recognition and failure analysis
Publication Innovating SRAM design for fast process related defect recognition and failure analysis
Publication Plasma damage in HIMOSTM non-volatile memories (NVM)
Proceedings paper2004-05, IEEE International Conference on Integrated Circuit Design and Technology - ICICDT, 17/05/2004, p.223-226Publication Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab
; ; ; Proceedings paper2001, Proceedings IEDM; Washington, DC, December 3-5, 2001., p.921-924