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Browsing by Author "Deduytsche, D."

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    Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films

    Opsomer, Karl  
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    Schaekers, Marc  
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    Rampelberg, G.
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    Deduytsche, D.
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    Detavernier, C.
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    Kittl, Jorge
    Meeting abstract
    2009, 216th ECS Meeting, 4/10/2009, p.2138
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    In-situ curvature and diffraction measurements on thin-film Ni/Ge(100) and Ni/Ge(111) solid state reactions

    Opsomer, Karl  
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    Deduytsche, D.
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    Detavernier, C.
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    Lavoie, C.
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    Lauwers, Anne  
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    Van Meirhaeghe, R.L.
    Meeting abstract
    2007, Materials for Advanced Metallization. Abstracts Book, 4/03/2007
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    Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions

    Opsomer, Karl  
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    Deduytsche, D.
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    Detavernier, C.
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    Van Meirhaeghe, R.L.
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    Lauwers, Anne  
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    Maex, Karen  
    Journal article
    2007, Applied Physics Letters, (90) 3, p.31906
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    Ternary silicide formation from Ni-Pt, Ni-Pd and Pt-Pd alloys on Si(100): Nucleation and solid solubility of the monosilicides

    Schrauwen, A.
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    Demeulemeester, J.
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    Deduytsche, D.
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    Devulder, Wouter  
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    Detavernier, C.
    Journal article
    2017, Acta Materialia, 130, p.19-27
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    Texture of atomic layer deposited ruthenium

    Musschoot, J.
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    Xie, Q.
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    Deduytsche, D.
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    De Keyser, K.
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    Longrie, D.
    ;
    Haemers, J.
    ;
    Van den Berghe, S.
    Journal article
    2010, Microelectronic Engineering, (87) 10, p.1879-1883

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