Browsing by Author "Dilliway, G."

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Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

Pawlak, Malgorzata
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Menou, Nicolas
;
Wang, Xin Peng
;
Dilliway, G.
;
Pierreux, D.
;
Fischer, P.
Oral presentation
2008, MRS Spring Meeting Symposium H: Materials Science of High-k Dielectric Stacks
Effect of chemical growth air filter for wafer storage before epitaxial growth

Wada, Masayuki
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Sano, Tomohiro
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Leys, Frederik
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Dilliway, G.
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Loo, Roger
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Mertens, Paul
;
Snow, j.
Proceedings paper
2008, SEMATECH Meeting, 31/03/2008
Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications

Dilliway, G.
;
Pierreux, D.
;
Fischer, P.
;
Menou, Nicolas
;
Pawlak, Malgorzata
;
Wang, Xin Peng
Proceedings paper
2008, 8th International Conference on Atomic Layer Deposition - ALD, 29/06/2008
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

Druais, Gael
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Dilliway, G.
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Fischer, P.
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Guidotti, E.
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Luhn, Ole
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Radisic, Alex
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Zahraoui, S.
Journal article
2008, Microelectronic Engineering, (85) 10, p.1957-1961