Browsing by Author "Dirksen, Peter"
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Publication Characterization of a projection lens using the extended Nijboer-Zernike approach
Proceedings paper2002, Optical Microlithography XV, 5/03/2002, p.1392-1399Publication Development of a contact edge roughness measurement methodology and its sources in 193nm patterning
Proceedings paper2003, Interface '03, 22/09/2003Publication Novel aberration monitor for optical lithography
Proceedings paper1999, Optical Microlithography XII, 14/03/1999, p.77-86