Browsing by Author "Duriau, Edouard"
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Publication Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Journal article2010, Journal of Vacuum Science and Technology B, (28) 2, p.401-406Publication Analysis and modeling of the HV-SSRM nanocontact on silicon
Meeting abstract2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Dopant/carrier profiling for sub-45nm technologies
Meeting abstract2005, 8th International Workshop on Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors, 5/06/2005Publication Fabrication of cantilevers and double AFM tips for the nanoprofiler
Journal article2007, Microelectronic Engineering, (84) 5_8, p.1162-1167Publication Image contrast metrology for EUV lithography
Proceedings paper2022-09-29, International Conference on Extreme UltraViolet Lithography, SEP 26-29, 2022, p.122920APublication New SPM concept for accurate and repeatable tip positioning
Journal article2009, Microelectronic Engineering, (86) 4_6, p.1234-1237Publication Validation of imaging benefits of Dual Monopole exposures
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275006