Browsing by Author "Evrard, P."

Now showing 1 - 3 of 3

Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)

Sun, L.
;
Defranoux, C.
;
Stehlé, J.L.
;
Boher, P.
;
Evrard, P.
;
Bellandi, E.
;
Bender, Hugo
Proceedings paper
2004, Fundamentals of Novel Oxide/Semiconductor Interfaces, 1/12/2003, p.95-101
High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Boher, P.
;
Evrard, P.
;
Defranoux, C.
;
Darragon, A.
;
Sun, Lianchao
;
Fouere, J.C.
;
Stehlé, J.L.
Proceedings paper
2003-12, MRS Fall Meeting Symposium E: Fundamentals of Novel Oxide/Semiconductor Interfaces, 1/12/2003
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection

Boher, P.
;
Evrard, P.
;
Defranoux, C.
;
Fouere, J.C.
;
Bellandi, E.
;
Bender, Hugo
Proceedings paper
2003, Characterization and Metrology of ULSI Technology, 24/03/2003, p.148-153