Browsing by Author "Fernandez, Luis"
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Publication Building Blocks for a European Organ-on-Chip Roadmap
Editorial material2019, 36, p.481-492Publication Bulk FinFET Fin height control using Gas Cluster Ion Beam (GCIB) - Location Specific Processing (LSP)
Proceedings paper2013, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 24/09/2013, p.706-707Publication Si photonic device uniformity improvement using wafer-scale location specific processing
Proceedings paper2012, IEEE Photonics Conference, 23/09/2012, p.725-726Publication SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device
Proceedings paper2011-09, 8th International Conference in Group IV Photonics, 14/09/2011, p.71-73Publication SOI thickness uniformity improvement using wafer-scale corrective etching for silicon nano-photonic device
Proceedings paper2011, Proceedings of the Annual Symposium of the IEEE Photonics Benelux Chapter, 1/12/2011, p.289-292Publication Tungsten planarization by gas cluster ion beam with CHF3
Meeting abstract2013, Materials for Advanced Metallization - MAM, 10/03/2013, p.117-118