Browsing by Author "Fernandez Lanas, Tatiana"
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Publication Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layers
Journal article2010, IEEE Transactions on Semiconductor Manufacturing, (23) 4, p.538-544Publication Stress characteritzation of selective epitaxial Si1-xGex deposition for embedded source/drain before and after millisecond laser anneal
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2366Publication Stress characterization of selective epitaxial Si1-xGex deposition for embedded source/drain before and after millisecond laser anneal
Proceedings paper2009, ULSI Process Characterization 6, 4/10/2009, p.217-227