Browsing by Author "Friedrich, M."
Now showing 1 - 6 of 6
- Results Per Page
- Sort Options
Publication Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films
;Murray, C. ;Flannery, C. ;Streiter, I. ;Schulz, S. E. ;Baklanov, MikhaïlMogilnikov, K. P.Journal article2002, Microelectronic Engineering, (60) 1_2, p.133-141Publication Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films
;Murray, C. ;Flannery, C. ;Streiter, I. ;Schulz, S. E. ;Baklanov, MikhaïlMogilnikov, K. P.Oral presentation2001, MAM - European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden.Publication Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazane
;Himcinschi, C. ;Friedrich, M. ;Frühauf, S. ;Streiter, I. ;Schulz, S.E.Gessner, T.Journal article2002, Analytical and Bioanalytical Chemistry, 374, p.654-657Publication Ellipsometric study of the change in the porosity of silica xerogels after surface chemical modification with hexamethyldisilizane
;Himcinschi, C. ;Friedrich, M. ;Frühauf, S. ;Streiter, I. ;Schulz, S. E.Gessner, T.Oral presentation2001, 11. Tagung Festkörperanalytik. 11th Conference on Solid State Analytics; 25-28 June 2001; Chemnitz.Publication Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance
;Fruhauf, S. ;Himcinschi, C. ;Rennau, M. ;Schulze, K. ;Schulz, S.E. ;Friedrich, M.Gessner, T.Journal article2005, Microelectronic Engineering, (82) 3_4, p.405-410Publication The benefits of interdisciplinary scenario-building for hybrid radio applications
; ;Friedrich, M.; ; ;Ebert, A.Journal article2020-11, Telematics and Informatics, 54, p.101455