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Browsing by Author "Friedrich, M."

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    Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films

    Murray, C.
    ;
    Flannery, C.
    ;
    Streiter, I.
    ;
    Schulz, S. E.
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    Baklanov, Mikhaïl
    ;
    Mogilnikov, K. P.
    Journal article
    2002, Microelectronic Engineering, (60) 1_2, p.133-141
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    Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films

    Murray, C.
    ;
    Flannery, C.
    ;
    Streiter, I.
    ;
    Schulz, S. E.
    ;
    Baklanov, Mikhaïl
    ;
    Mogilnikov, K. P.
    Oral presentation
    2001, MAM - European Workshop on Materials for Advanced Metallization; 5-7 March 2001; Sigtuna, Sweden.
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    Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazane

    Himcinschi, C.
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    Friedrich, M.
    ;
    Frühauf, S.
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    Streiter, I.
    ;
    Schulz, S.E.
    ;
    Gessner, T.
    Journal article
    2002, Analytical and Bioanalytical Chemistry, 374, p.654-657
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    Ellipsometric study of the change in the porosity of silica xerogels after surface chemical modification with hexamethyldisilizane

    Himcinschi, C.
    ;
    Friedrich, M.
    ;
    Frühauf, S.
    ;
    Streiter, I.
    ;
    Schulz, S. E.
    ;
    Gessner, T.
    Oral presentation
    2001, 11. Tagung Festkörperanalytik. 11th Conference on Solid State Analytics; 25-28 June 2001; Chemnitz.
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    Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance

    Fruhauf, S.
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    Himcinschi, C.
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    Rennau, M.
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    Schulze, K.
    ;
    Schulz, S.E.
    ;
    Friedrich, M.
    ;
    Gessner, T.
    Journal article
    2005, Microelectronic Engineering, (82) 3_4, p.405-410
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    The benefits of interdisciplinary scenario-building for hybrid radio applications

    Jennes, Iris  
    ;
    Friedrich, M.
    ;
    Van Der Bank, Jaco  
    ;
    Van Den Broeck, Wendy  
    ;
    Ebert, A.
    ;
    Boonen, Michelle  
    Journal article
    2020-11, Telematics and Informatics, 54, p.101455

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