Browsing by Author "Fukui, Takeo"
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Publication Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Meeting abstract2021, Ultrapure Micro 2021 Annual Conference, 3-5 November 2021Publication Study on La2O3 wet clean by pH controlled functional water
Proceedings paper2019, 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16), 13/10/2019, p.21-26Publication Study on La2O3 wet clean by pH controlled functional water
Meeting abstract2019, ECS Fall Meeting G01-16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16), 13/10/2019, p.1094