Browsing by Author "Fung Chen, J."
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Publication Double dipole lithography for 65-nm node and beyond: a technology readiness review
Proceedings paper2004-08, Photomask and Next-Generation Lithography Mask Technology XI, 14/04/2004, p.481-498Publication Through pitch low-k1 contact hole imaging with CPL(TM) technology
Journal article2004, Photomask, BACUS News, (20) 12, p.1-11Publication Through pitch low-k1 contact hole imaging with CPLTM technology
Proceedings paper2004, Photomask and Next-Generation Lithography Mask Technology XI, 14/04/2004, p.585-594