Browsing by Author "Godavarthi, Srinivas"
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Publication Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
Meeting abstract2012-03, Materials for Advanced Characterization - MAM, 11/03/2012, p.P3-05Publication Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Journal article2013, Microelectronic Engineering, 107, p.134-137Publication Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films
Journal article2015, Thin Solid Films, 575, p.103-106Publication Study of porogen removal by HWCVD for the fabrication of advanced low-k films
Meeting abstract2012, 7th International Conference on Hot- Wire Chemical Vapor deposition - Cat-CVD, 8/10/2012, p.T5-7-T5-7