Browsing by Author "Goedbloed, Martijn"
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Publication A batch process micromachined thermoelectric energy harvester: fabrication and characterization
Journal article2010-10, Journal of Micromechanics and Microengineering, (20) 10, p.104005Publication A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Proceedings paper2013, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.693-696Publication A new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic mass
Publication Anodic dissolution for etching large length-to-height ratio microfluidic channels
Proceedings paper2010, 12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems - ACTUATOR, 14/06/2010Publication Charge injection and storage in single-layer and multilayer electrets based on SiO2 and Si3N4
Journal article2012, IEEE Transactions on Dielectrics and Electrical Insulation, (19) 4, p.1253-1260Publication Comparison of positively and negatively charged layered inorganic electrets for high operational temperatures
Proceedings paper2011-09, 14th International Symposium on Electrets, 28/08/2011, p.43-44Publication Design improvements for an electret-based MEMS vibrational electrostatic energy harvester
Proceedings paper2013, Proceedings 13th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS, 3/12/2013, p.12078Publication Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms
Publication Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
Publication Effect of length/width ratio of tapered beams on performance of piezo electric energy harvesters
Publication Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
Publication Electret patterning technologies for microsystems
Proceedings paper2010, Smart Systems Integration: 4th European Conference on Integration Issues of Miniaturized Systems, 23/03/2010, p.35Publication Electrostatically driven microfluidic actuators for autonomous applications
Proceedings paper2010, 12th International Conference on New Actuators and 6th International Exhibition on Smart Actuators and Drive Systems - ACTUATOR, 14/06/2010Publication Fine patterning of electrets for sensors and energy harvesters
Proceedings paper2012-10, IEEE Sensors Conference, 28/10/2012, p.1806-1809Publication First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester
Proceedings paper2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.543-546Publication MEMS based mechanical energy harvesters
Oral presentation2010, 36th International Conference on Micro & Nano Engineering - MNEPublication MEMS-based aluminum nitride piezoelectric energy harvesting module
Proceedings paper2009, Smart Systems Integration, 10/03/2009Publication Micromachined thermoelectric energy harvester fabrication on 6-inch wafer and characterization
Proceedings paper2009-12, 9th PowerMEMS Workshop, 1/12/2009, p.157-160Publication Modeling and characterizaiton of MEMS-based piezoelectric harvesting devices
Journal article2010, Journal of Micromechanics and Microengineering, (20) 10, p.105023Publication Multilayer electrets for vibration energy harvesting at extremely high temperatures
Proceedings paper2011-03, 5th Smart Systems Integration Conference - SSI, 22/03/2011, p.Paper 21