Browsing by Author "Granneman, E.H.A."

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A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Vermeulen, W.J.C.
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kwakman, L.F.T.
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Werkhoven, C.J.
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Granneman, E.H.A.
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Verhaverbeke, Steven
Proceedings paper
1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.241-252
Characterization of high-throughput spatial ALD Al2O3 as surface passivation for industrial local Al BSF Si solar cells

Vermang, Bart
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Goverde, Hans
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Rothschild, Aude
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John, Joachim
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Poortmans, Jef
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Mertens, Robert
Proceedings paper
2011, 26th European Photovoltaic Solar Energy Conference and Exhibition - EU PVSEC, 5/09/2011, p.2189-2190
Improved thermal stability of Ni-silicides on Si:C epitaxial layers

Machkaoutsan, Vladimir
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Mertens, Sofie
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Bauer, R.
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Lauwers, Anne
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Verheyden, Kurt
Journal article
2007, Microelectronic Engineering, 84, p.2542-2546
Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability

Vermont, P.G.
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Pages, X.
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Granneman, E.H.A.
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Vanormelingen, Koen
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Verheyden, K.
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Mertens, Sofie
Journal article
2007, Microelectronic Engineering, (84) 11, p.2572-2574