Browsing by Author "Green, M.L."

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Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks

Green, M.L.
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Chang, Shou-Zen
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De Gendt, Stefan
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Schram, Tom
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Hattrick-Simpers, J.
Journal article
2007-09, Microelectronic Engineering, (84) 9_10, p.2209-2212
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, K.S.
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Green, M.L.
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Suehle, J.
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Hattrick-Simpers, J.
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Takeuchi, I.
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Ohmori, K.
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Chikyow, T.
Meeting abstract
2008, 213th ECS Meeting, 18/05/2008, p.712
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, Kao-Shuo
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Green, M.L.
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Suehle, J.
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Hattrick-Simpers, J.
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Takeuchi, I.
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Ohmori, K.
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Chikyow, T.
Proceedings paper
2008, Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing, 18/05/2008, p.151-159
Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

Frank, M.M.
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Dörmann, S.
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Chabal, Y.J.
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Sayan, S.
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Garfunkel, E.
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Wilk, G.D.
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Green, M.L.
Oral presentation
2003, E-MRS Spring Meeting Symposium I Functional Metal Oxides - Semiconductor Structures
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

Chang, K.S.
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Green, M.L.
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Levin, I.
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Hattrick-Simpers, J.R.
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Jaye, C.
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Fischer, D.A.
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Takeuchi, I.
Journal article
2010, Applied Physics Letters, (96) 19, p.192114