Browsing by Author "Gronbeck, D."
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Publication Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Journal article2002, Microelectronic Engineering, (64) 1_4, p.351-360Publication Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.273-278Publication Single damascene integration of porous zirkonTM version 1 low-k dielectric films
Journal article2003-11, Microelectronic Engineering, (70) 2_4, p.302-307