Browsing by Author "Hangen, Ude"
Now showing 1 - 7 of 7
- Results per page
- Sort Options
Publication Assessment of mechanical properties in nanotechnology: porous low-k dielectrics, TSVs and bumps
Meeting abstract2013, Nanobrueken-Dresden. A Nanomechanical Testing Workshop & Hysitron User Meeting, 20/03/2013Publication Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures
Meeting abstract2016, Materials for Advanced Metallization Conference - MAM, 20/03/2016, p.61-62Publication Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
Journal article2016, Journal of Applied Physics, (119) 2, p.25302Publication Mechanical behavior of porous thin low-k films during nanoindentation
Meeting abstract2019, Nanobruecken 2019, 19/02/2019Publication Substrate independent elastic modulus of thin low dielectric constant materials
Journal article2017, Advanced Engineering Materials, (19) 8, p.1600653Publication Substrate independent mechanical properties of thin low dielectric constant materials
Meeting abstract2016, Materials for Advanced Metallization - MAM, 20/03/2016, p.63-64Publication Thermal expansion coefficients of ultralow-k dielectric films by cube corner indentation tests at elevated temperatures
Journal article2015, Applied Physics Letters, (107) 23, p.233101