Browsing by Author "Harukawa, Ryota"
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Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Defect source analysis of directed self-assembly process (DSA of DSA)
Proceedings paper2013, Alternative Lithographic Technologies V, 24/02/2013, p.86800LPublication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication Inspection of directed self assembly defects
Publication Quantitative pattern collapse metrology for 193nm immersion lithography
Journal article2011, Journal of Photopolymer Science and Technology, (24) 2, p.233-238