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Browsing by Author "Herms, Martin"

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    A photo-elastic microscopy study of the temperature dependecy of stress induced by through silicon vias in silicon

    Herms, Martin
    ;
    Wagner, Matthias
    ;
    De Messemaeker, Joke  
    ;
    De Wolf, Ingrid  
    Journal article
    2017, Physica Status Solidi C, (14) 7, p.1700028
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    Copper through silicon vias studied by the photo-elastic Scanning Infrared Microscope SIREX

    Herms, Martin
    ;
    Wagner, M.
    ;
    De Wolf, Ingrid  
    Journal article
    2016, Microelectronics Reliability, 64, p.330-335
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    Defect-induced stress imaging in single and multi-crystalline semiconductor materials

    Herms, Martin
    ;
    Wagner, Matthias
    ;
    Kayser, Stefan
    ;
    Kießling, Frank
    ;
    Poklad, Anna
    ;
    Zhao, Ming  
    Journal article
    2018, Materials Today, (5) 6, p.14748-14756
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    Failure and stress analysis of Cu TSVs using

    De Wolf, Ingrid  
    ;
    Khaled, Ahmad  
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    Herms, Martin
    ;
    Wagner, Matthias
    ;
    Djuric, Tatjana
    Proceedings paper
    2015, 41st International Symposium for Testing and Failure Analysis - ISTFA, 1/11/2015, p.119-25
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    Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement technique

    Herms, Martin
    ;
    Wagner, Matthias
    ;
    Molchanov, Alexander
    ;
    Lin, Pinyen
    ;
    De Wolf, Ingrid  
    ;
    Zhao, Ming  
    Journal article
    2015, Physica Status Solidi C, (12) 8, p.1085-1089
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    Photo-elastic characterization of defect structures in mono and multi-crystalline semiconductor materials

    Herms, Martin
    ;
    Wagner, Matthias
    ;
    Kayser, Stefan
    ;
    Kießling, Frank
    ;
    Poklad, Anna
    ;
    Zhao, Ming  
    Meeting abstract
    2016-09, Extended Defects in Semiconductors (EDS) Conference, 25/09/2016, p.77

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