imec Institutional Repository Browsing {{ collection }} by Author "Hong, Le"

Publication

Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography

Ma, Yuansheng

;

Lei, Junjiang

;

Torres, J. Andres

;

Hong, Le

;

Word, James

;

Fenger, Germain

Proceedings paper

2015, Alternative Lithographic Technologies VII, 22/02/2015, p.942306

Publication

Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng

;

Lei, Junjiang

;

Torres, J. Andres

;

Hong, Le

;

Word, James

;

Fenger, Germain

Journal article

2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31216

Publication

Double patterning EDA solutions for the 32nm HP and beyond

Bailey, George

;

Tritchkov, Alexander

;

Park, Jea-Woo

;

Hong, Le

;

Wiaux, Vincent

;

Hendrickx, Eric

Proceedings paper

2007, Design for Manufacturability through Design-Process Integration, 28/02/2007, p.65211k

Publication

Impact of illumination source symmetrization in OPC

Sturtevant, John L.

;

Hong, Le

;

Jayaram, Srividya

;

Renwick, Stephen P.

;

McCallum, Martin

Proceedings paper

2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70283M

Browsing by Author "Hong, Le"