imec Institutional Repository Browsing {{ collection }} by Author "Hong, Le"

Publication

Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography

Ma, Yuansheng

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Lei, Junjiang

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Torres, J. Andres

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Hong, Le

;

Word, James

;

Fenger, Germain

Proceedings paper

2015, Alternative Lithographic Technologies VII, 22/02/2015, p.942306

Publication

Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng

;

Lei, Junjiang

;

Torres, J. Andres

;

Hong, Le

;

Word, James

;

Fenger, Germain

Journal article

2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31216

Publication

Double patterning EDA solutions for the 32nm HP and beyond

Bailey, George

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Tritchkov, Alexander

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Park, Jea-Woo

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Hong, Le

;

Wiaux, Vincent

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Hendrickx, Eric

Proceedings paper

2007, Design for Manufacturability through Design-Process Integration, 28/02/2007, p.65211k

Publication

Impact of illumination source symmetrization in OPC

Sturtevant, John L.

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Hong, Le

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Jayaram, Srividya

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Renwick, Stephen P.

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McCallum, Martin

Proceedings paper

2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70283M

Publication

Machine Learning-based SEM Images Contour Extraction Data Augmentation

Zhang, Hongming

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Ma, Yuansheng

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Fang, Hawren

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Zeng, Xuefeng

;

Hong, Le

;

Sun, Yuyang

;

Meng, Renyang

Proceedings paper

2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134262X

Browsing by Author "Hong, Le"