Browsing by Author "Horsfall, A.B."

Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects

In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects

Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction

Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects